Nanoscale etching of perovskite oxides for field effect transistor applications
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: Journal of Vacuum Science & Technology B
سال: 2020
ISSN: 2166-2746,2166-2754
DOI: 10.1116/1.5122667